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The Fab at Oxford

Micro and Nanofabrication at the University of Oxford

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Nanofabrication Cleanroom
Atomic layer deposition
Contact profilometry
Electron-beam evaporation
Electron-beam lithography
Laser Writer
Mask aligner
Reactive-ion etching
Sputtering
4K Ultra-High Accuracy Microscope
Oxygen plasma cleaner
Scanning Electron Microscope
Thermal evaporation
UV-ozone cleaner
Wirebonding

UV-ozone cleaner

The UV-ozone cleaner is a tool that uses ultraviolet light and reactive ozone to clean substrates.

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There's plenty of room at the bottom

- Richard Feynman

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