The Microfabrication Cleanroom is part of the Oxford University Science Park found near Begbroke. The cleanroom came into operation in 2002 and provides 150 m2 of class 10,000 cleanroom space, housing a suite of newly purchased processing equipment, including an e-beam evaporator, PECVD, and photolithography. For details of the equipment see the equipment list. The cleanroom monitoring and control have been provided by Seachange using SmartKontrols that provide an intelligent network.
There are office facilities for users located next to the cleanroom with a networked computer for e-mail, electronic resources, etc., which also acts as a cleanroom library housing, for reference only, the manuals for the equipment.
For more details about the Microfabrication Cleanroom please contact Radka Chakalova or visit the Begbroke Science Park web page.
