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The Fab at Oxford

Micro and Nanofabrication at the University of Oxford

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Microfabrication Cleanroom
Electron-Beam Evaporator (old)
Plasma-enhanced chemical vapor deposition
Wafer mask aligner

Electron-Beam Evaporator - Eurocoater

VTE Ltd. Eurocoater EC18B

Electron-beam evaporator in Begbroke Science Park

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There's plenty of room at the bottom

- Richard Feynman

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