Nanofabrication

The Fab at Oxford provides resources and staff support for the fabrication and characterisation of nanoscale devices and structures.

Nanofabrication is carried out in both our cleanrooms, located at Begbroke Science Park and in Oxford City Centre. The fabrication of nanophotonic circuits, metasurfaces, nanomagnets, and more, is possible due to the extensive range of instruments available. Our facilities offer several deposition techniques, including plasma-enhanced CVD (PECVD), atomic layer deposition (ALD), thermal and e-beam evaporation, and sputtering. An e-beam lithography (EBL) system and two optical lithography systems are available in Oxford Nano for the fabrication of nano- and microstructures. Reactive ion etching (RIE), oxygen plasma etching, and wet etching are also available, in addition to standard cleanroom equipment, such as fume hoods, hot-plates, and ultrasonic baths.